Substrate Structure Grown By Plasma Deposition
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United States of America Patent
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Issued Date -
Mar 1, 2012
app pub date -
May 25, 2010
filing date -
Jun 11, 2009
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Abandoned
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Abstract
Substrate structure comprising a substrate (6) and a plasma grown layer (6a). The surface of the resulting substrate structure (7) is characterized by interrelated scaling components. The scaling components comprise a roughness exponent α, a growth exponent β and a dynamic exponent z, wherein the growth exponent β has a value of less than 0.2 and the dynamic exponent z has a value of more than 6. Also disclosed is a method to provide such a substrate structure.
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