NANOWIRE BASED GAS IONIZATION SENSOR

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United States of America Patent

APP PUB NO 20120049854A1
SERIAL NO

13217165

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A gas ionization sensor is disclosed. In one aspect, the sensor includes at least one sensing element on a substrate. The sensing element includes: at least one nanowire and a counter electrode which surrounds the nanowire, the surrounding electrode being electrically isolated from the nanowire and being at a predetermined gap from the nanowire, the gap allowing penetration of a gas or a gas mixture between the nanowire and the surrounding electrode. The sensing element also includes a voltage source electrically connected between the nanowire and the surrounding electrode for providing a voltage difference between the nanowire and the surrounding electrode, and measurement circuitry for measuring a breakdown voltage and/or an electrical discharge current and/or a prebreakdown current through the gap.

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Patent Owner(s)

Patent OwnerAddress
STICHTING IMEC NEDERLANDHIGH TECH CAMPUS 31 EINDHOVEN 5656 AE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Offermans, Peter Eindhoven, NL 16 81

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