Micromachined Piezoelectric Energy Harvester with Polymer Beam
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United States of America Patent
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Issued Date -
Mar 1, 2012
app pub date -
Aug 24, 2011
filing date -
Aug 27, 2010
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Abandoned
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Abstract
A micromachined piezoelectric energy harvester and methods of fabricating a micromachined piezoelectric energy harvester are disclosed. In one embodiment, the micromachined piezoelectric energy harvester comprises a resonating beam formed of a polymer material, at least one piezoelectric transducer embedded in the resonating beam, and at least one mass formed on the resonating beam. The resonating beam is configured to generate mechanical stress in the at least one piezoelectric transducer, and the at least one piezoelectric transducer is configured to generate electrical energy in response to the mechanical stress.
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