CARRIER FOR A SUBSTRATE AND A METHOD FOR ASSEMBLING THE SAME

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United States of America Patent

APP PUB NO 20120048186A1
SERIAL NO

12875213

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Abstract

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Carriers for substrates and to methods for assembling the same in the field of vacuum deposition of thin films. In particular, a carrier for a substrate to be coated in a vacuum chamber includes a first frame comprising two vertical sections and two horizontal sections being dimensioned to surround the substrate; a second dimensioned to define an area of the substrate to be coated, and to cover at least a first part of the first frame to prevent the first part of the first frame from being coated when the second frame is mounted to the first frame. The second frame is detachably mounted to the first frame.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brüning, Andre Stockstadt, DE 4 10
Heimel, Oliver Wabern, DE 23 56
Hinterschuster, Reiner Hammersbach, DE 7 62
Wolf, Hans Georg Erlensee, DE 3 442

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