LIQUID SOURCE VAPORIZER
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United States of America Patent
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N/A
Issued Date -
Feb 23, 2012
app pub date -
Apr 19, 2010
filing date -
Apr 21, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention is one that is intended to prevent bubbles from being recombined to suppress the bubbles from being enlarged, and also homogenize a temperature distribution of a stored liquid source, and provided with: a liquid source container; a first heater that is provided on a side wall of the liquid source container and intended to heat the stored liquid source to a predetermined temperature; a second heater that is provided in an inside central part of the liquid source container and intended to heat the stored liquid source to the predetermined temperature; a plurality of bubble generators that are immersed into the stored liquid source, provided between the second heater and the side wall, and release carrier gas into the liquid source to perform bubbling; and a gas supply pipe that supplies the carrier gas to the bubble generators.
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