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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOYOTA JIDOSHA KABUSHIKI KAISHA	1 TOYOTA-CHO TOYOTA-SHI AICHI-KEN 471-8571
YAZAKI CORPORATION	TOKYO

International Classification(s)

• G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....

• 2010 Application Filing Year
• G01N Class
• 6444 Applications Filed
• 4361 Patents Issued To-Date
• 67.68 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ikeda, Tomohiro	Shizuoka-ken, JP	135	1824
# of filed Patents : 135 Total Citations : 1824
Nagata, Shuichi	Aichi-ken, JP	15	188
# of filed Patents : 15 Total Citations : 188
Shoji, Takao	Aichi-ken, JP	23	199
# of filed Patents : 23 Total Citations : 199
Tsushima, Manabu	Aichi-ken, JP	14	304
# of filed Patents : 14 Total Citations : 304
Watanabe, Shigenori	Aichi-ken, JP	15	60
# of filed Patents : 15 Total Citations : 60
Yamazaki, Hikohito	Aichi-ken, JP	7	62
# of filed Patents : 7 Total Citations : 62

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Patent Citation Ranking

• 15 Citation Count
• G01N Class

• 65.77 % this patent is cited more than
• 13 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2008/0163,096

METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

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Abstract

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Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

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Description

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Claims

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