Precision spacing for stacked wafer assemblies
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United States of America Patent
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Sep 16, 2014
Grant Date -
Feb 9, 2012
app pub date -
Apr 21, 2011
filing date -
Apr 21, 2010
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Abstract
An assembly including a first wafer, a second wafer, a spacing wafer configured to be positioned between the first wafer and the second wafer, and a plurality of spacing elements configured to be positioned within the spacing wafer and to contact the first wafer and the second wafer, the spacing elements sized to define a first spacing distance between the first wafer and the second wafer.
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