Distributed multi-zone plasma source systems, methods and apparatus

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United States of America Patent

PATENT NO 9155181
APP PUB NO 20120034394A1
SERIAL NO

12852352

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Abstract

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A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber and multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites. A system and method for generating a plasma are also described.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Benzerrouk, Souheil Hudson, US 18 1099
Cowe, Andrew Andover, US 15 974
Entley, William R Wakefield, US 9 633
Gottscho, Richard Dublin, US 16 1242
Nagarkatti, Siddharth P Acton, US 25 2312
Shajii, Ali Weston, US 85 3529

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