Method for depositing oxide thin films on textured and curved metal surfaces
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United States of America Patent
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Feb 4, 2014
Grant Date -
Feb 2, 2012
app pub date -
Dec 18, 2009
filing date -
Dec 18, 2008
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Abstract
Method of depositing a layer of oxide of at least one metal element on a curved surface of a textured metal substrate,
- said method comprising the following steps:(1) a layer of a precursor of at least one oxide of a metal is deposited using an organic solution of at least one precursor of said metal, this solution preferably having a viscosity, measured at the temperature of the method, of between 1 mPa s and 20 mPa s, and even more preferentially between 2 mPa s and 10 mPa s.(2) said layer of oxide precursor is left to dry,(3) heat treatment is carried out in order to pyrolyse said oxide precursor and to form the oxide, at least part of said heat treatment being carried out under a flow of reducing gas, said reducing gas preferably having a flow rate greater than 0.005 cm/s, preferentially between 0.012 cm/s and 0.1 cm/s, and even more preferentially between 0.04 cm/s and 0.08 cm/s.
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