Grinding Tool For Trapezoid Grinding Of A Wafer
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United States of America Patent
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Issued Date -
Feb 2, 2012
app pub date -
Jul 30, 2010
filing date -
Jul 30, 2010
priority date (Note) -
Abandoned
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Abstract
A grinding tool for trapezoid grinding of a wafer on a profiling machine includes an annular wheel including a central hole adapted for mounting the wheel on a spindle. The wheel includes at least two grooves disposed at an outer edge of the wheel and the grooves are sized for receiving an outer edge of the wafer. At least one of the grooves is adapted for rough grinding of the wafer. At least one other of the grooves is adapted for fine grinding of the wafer.
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