METHOD FOR LOWERING THE PRESSURE IN A LOAD LOCK AND ASSOCIATED EQUIPMENT
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United States of America Patent
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Issued Date -
Feb 2, 2012
app pub date -
Dec 18, 2009
filing date -
Dec 19, 2008
priority date (Note) -
Abandoned
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Abstract
The invention relates to a method for lowering the pressure in a device charge-discharge lock from atmospheric pressure to a sub-atmospheric transfer pressure, said lock comprising a chamber in which at least one substrate is arranged at atmospheric pressure, said method comprising: a first step (101), in which first primary pumping is carried out from atmospheric pressure to a first characteristic threshold, using a primary pump with limited pumping rate, while isolating a turbomolecular pumping of said chamber; a second step (102) following said first step (101), in which a second primary pumping is carried out, faster than in said first step, to a second characteristic threshold, maintaining the isolation of the turbomolecular pumping; a third step (103) following said second step (102), in which secondary pumping is performed using said turbomolecular pumping upstream from the first pumping, and the primary pump chamber is isolated. The invention also relates to a device for implementing the method.
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