Thin films and methods of making them using cyclohexasilane
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Feb 2, 2012
app pub date -
Jun 23, 2011
filing date -
Jul 2, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Cyclohexasilane is used in chemical vapor deposition methods to deposit epitaxial silicon-containing films over substrates. Such methods are useful in semiconductor manufacturing to provide a variety of advantages, including uniform deposition over heterogeneous surfaces, high deposition rates, and higher manufacturing productivity. Furthermore, the crystalline Si may be in situ doped to contain relatively high levels of substitutional carbon by carrying out the deposition at a relatively high flow rate using cyclohexasilane as a silicon source and a carbon-containing gas such as dodecalmethylcyclohexasilane or tetramethyldisilane under modified CVD conditions.
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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MATHESON TRI-GAS INC | BASKING RIDGE NJ 07920 |
International Classification(s)

- 2011 Application Filing Year
- C30B Class
- 359 Applications Filed
- 298 Patents Issued To-Date
- 83.01 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Brabant, Paul David | East Greenbush, US | 2 | 390 |
# of filed Patents : 2 Total Citations : 390 | |||
Francis, Terry Arthur | Schenectady, US | 2 | 390 |
# of filed Patents : 2 Total Citations : 390 | |||
Hasaka, Satoshi | Tokyo, JP | 8 | 429 |
# of filed Patents : 8 Total Citations : 429 | |||
Torres,, JR Robert | Parker, US | 24 | 568 |
# of filed Patents : 24 Total Citations : 568 |
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Patent Citation Ranking
- 378 Citation Count
- C30B Class
- 98.83 % this patent is cited more than
- 13 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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