FLUORESCENCE-DETECTING DISK INSPECTION SYSTEM
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United States of America Patent
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Issued Date -
Jan 12, 2012
app pub date -
Jul 9, 2011
filing date -
Jul 12, 2010
priority date (Note) -
Abandoned
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Abstract
An optical inspection system includes a fluorescence channel that detects fluorescent behavior (or lack thereof) of artifacts present on a surface under inspection and at least one other optical channel for determining a characteristic of the surface under inspection in an illuminated spot. The other optical channel may be a height measuring channel, such as an interferometric channel or a deflectometric channel, the other optical channel may be a scatterometric channel, or both height measurement and scatterometry may be employed in combination as a three channel system. The presence of absence of fluorescent behavior may be used to correct assumptions about or determine a type of artifact detected by scatterometry, and may be used to correct the polarity of a height measurement made by a height-measuring channel.
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