MOCVD REACTOR HAVING A CEILING PANEL COUPLED LOCALLY DIFFERENTLY TO A HEAT DISSIPATION MEMBER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20120003389A1
SERIAL NO

13256224

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The invention relates to a device for depositing at least one, in particular crystalline, layer on at least one substrate (5), having a susceptor (2) for accommodating the at least one substrate (5), the susceptor forming the floor of a process chamber (1), having a cover plate (3) which forms the ceiling of the process chamber (1), and having a gas inlet element (4) for introducing process gases, which decompose into the layer-forming components in the process chamber as the result of heat input, and a carrier gas, wherein below the susceptor (2) a multiplicity of heating zones (H.sub.1-H.sub.8) are situated next to one another, by means of which in particular different heat outputs (Q.sub.1, Q.sub.2) are introduced into the susceptor (2) in order to heat the susceptor surface facing the process chamber (1) and the gas located inside the process chamber (1), a heat dissipation element (8) which is thermally coupled to the cover plate (3) being provided above the cover plate (3) in order to dissipate the heat transported from the susceptor (2) to the cover plate (3). To increase the crystal quality and the efficiency of the deposition process, it is proposed that the heat-conveying coupling between the cover plate (3) and the heat dissipation element (8) is different at different locations, heat-conveying coupling zones (Z.sub.1-Z.sub.8) having high heat-conveying capability corresponding in location to heating zones (H.sub.1-H.sub.8) of high heat output (Q.sub.1, Q.sub.2).

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
AIXTRON SEGERMAN HERZOGENRATH HERZOGENRATH NORTH RHINE-WESTPHALIA

International Classification(s)

loading....
  • 2010 Application Filing Year
  • C23C Class
  • 1580 Applications Filed
  • 1036 Patents Issued To-Date
  • 65.57 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20102011201220132014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brien, Daniel Aachen, DE 8 23
Franken, Walter Eschwiler, DE 16 285
Püsche, Roland Aachen, DE 2 9

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 4 Citation Count
  • C23C Class
  • 4.98 % this patent is cited more than
  • 13 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges404301516651271110362701 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0255075100125150175200225250275300325350375400425450475

Forward Cite Landscape

Load Citation