Chemical bath deposition apparatuses and fabrication methods for chemical compound thin films
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United States of America Patent
Stats
-
Apr 1, 2014
Grant Date -
Dec 29, 2011
app pub date -
Sep 24, 2010
filing date -
Jun 23, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Chemical bath deposition (CBD) apparatuses and fabrication methods for compound thin films are presented. A chemical bath deposition apparatus includes a chemical bath reaction container, a substrate chuck for fixing a substrate arranged face-down toward the bottom of the chemical bath reaction container, multiple solution containers connecting to a reaction solution mixer and further connection to the chemical bath reaction container, and a temperature control system including a first heater controlling the temperature of the chemical bath reaction container, a second heater controlling the temperature of the substrate chuck, and a third heater controlling the temperature of the multiple solution containers.
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International Classification(s)
- 2010 Application Filing Year
- B05C Class
- 589 Applications Filed
- 285 Patents Issued To-Date
- 48.39 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- B05C Class
- 16.87 % this patent is cited more than
- 11 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 1, 2025 |
