Inspection Apparatus Employing Wide Angle Objective Lens With Optical Window
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United States of America Patent
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Issued Date -
Dec 29, 2011
app pub date -
Apr 8, 2011
filing date -
Jun 29, 2010
priority date (Note) -
Abandoned
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Abstract
An optical window is used to facilitate best performance for imaging an object placed in a separate ambiance. The window can be in a particle detection system, comprising a separator between first and second environments. The separator comprises an opening and an optical element located within the opening. An object is located in the second environment. An objective lens is located in the first environment and a detector is located in the second environment and is configured to detect particles on a surface of the object.
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