MICRORESONATOR, RESONATOR SENSOR WITH SUCH MICRORESONATOR, AND SENSOR ARRAY COMPRISING AT LEAST TWO SUCH MICRORESONATORS

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United States of America Patent

APP PUB NO 20110316386A1
SERIAL NO

13162504

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microresonator for use as a resonator in a detector is disclosed. In one aspect, the microresonator has a first predetermined resonance mode. The microresonator has an integrated electronic transducer for measuring deformation of the microresonator in the first predetermined resonance mode of the microresonator. The transducer is located at a local deformation of the predetermined resonance mode to measure the deformation of the microresonator at such location. The first predetermined resonance mode may be one of higher order resonance modes.

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Patent Owner(s)

Patent OwnerAddress
STICHTING IMEC NEDERLAND5656 AE EINDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brongersma, Sywert H Eindhoven, NL 8 104
Crego, Calama Mercedes Crego Geldrop-Mierlo, NL 1 3
Karakaya, Koray Eindhoven, NL 38 262

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