MICRORESONATOR, RESONATOR SENSOR WITH SUCH MICRORESONATOR, AND SENSOR ARRAY COMPRISING AT LEAST TWO SUCH MICRORESONATORS
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United States of America Patent
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Issued Date -
Dec 29, 2011
app pub date -
Jun 16, 2011
filing date -
Jun 18, 2010
priority date (Note) -
Abandoned
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Abstract
A microresonator for use as a resonator in a detector is disclosed. In one aspect, the microresonator has a first predetermined resonance mode. The microresonator has an integrated electronic transducer for measuring deformation of the microresonator in the first predetermined resonance mode of the microresonator. The transducer is located at a local deformation of the predetermined resonance mode to measure the deformation of the microresonator at such location. The first predetermined resonance mode may be one of higher order resonance modes.
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