SENSOR-FITTED SUBSTRATE AND METHOD FOR PRODUCING SENSOR-FITTED SUBSTRATE

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United States of America Patent

APP PUB NO 20110315985A1
SERIAL NO

13148530

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A sensor-fitted substrate allowing a sensor-fitted wafer for measuring the temperature or strain to be produced inexpensively, moreover, allowing measurements of the temperature or strain to be carried out with satisfactory accuracy, and a method for producing such a sensor-fitted substrate. An undercoat film is formed on the surface of a substrate, the film being configured, compared to when no undercoat film is formed, to allow the strength of close contact of a dispersed nano-particle ink with the substrate to be increased, the diffusion of the dispersed nano-particle ink into the substrate to be suppressed, and the growth of metal crystal particles contained in the dispersed nano-particle ink to be suppressed. A wiring pattern of the sensor is traced on the surface of the undercoat film of the substrate surface by using the dispersed nano-particle ink, and the dispersed nano-particle ink is baked and metalized.

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Patent Owner(s)

Patent OwnerAddress
ULVAC INCKANAGAWA COUNTY JAPAN KANAGAWA
KELK LTDKANAGAWA COUNTY JAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Oba, Masakazu Kanagawa, JP 7 7
Oda, Masaaki Chiba, JP 29 444

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