GAS ION SOURCE WITH HIGH MECHANICAL STABILITY
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United States of America Patent
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app pub date -
Sep 7, 2011
filing date -
Aug 27, 2007
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Abandoned
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Abstract
A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
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