Method Of Continuously Producing Tetrafluorosilane By Using Various Fluorinated Materials, Amorphous Silica And Sulfuric Acid

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United States of America Patent

APP PUB NO 20110305621A1
SERIAL NO

12989618

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KCC CORPORATION344 SAPYEONG-DAERO SEOCHO-GU SEOUL 06608

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Inventor Name Address # of filed Patents Total Citations
Cho, Yeon Seok Suwan-si, KR 5 13
Kang, Kyung Hoon Suwon-si, KR 5 2
Kim, Se Jong Seongnam, KR 33 55

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