MEMS DEVICE AND PROCESS
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United States of America Patent
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Issued Date -
Dec 15, 2011
app pub date -
Feb 12, 2010
filing date -
Feb 13, 2009
priority date (Note) -
Abandoned
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Abstract
A micro-electrical-mechanical system (MEMS) transducer comprises a layer of dielectric material having an electrode formed in the layer of dielectric material. A region of the layer of the dielectric material is adapted to provide a leakage path which, in use, removes unwanted charge from the layer of dielectric material.
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