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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
H C STARCK INC	45 INDUSTRIAL PLACE NEWTON MA 02461

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
• B32B:LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Confroy, Mark	Solon, US	1	29
# of filed Patents : 1 Total Citations : 29
Jepson, Peter	Newbury, US	5	121
# of filed Patents : 5 Total Citations : 121
Kumar, Prabhat	Framingham, US	94	1335
# of filed Patents : 94 Total Citations : 1335
McCorry, Richard	Rochester Hills, US	2	115
# of filed Patents : 2 Total Citations : 115
Miller, Steven A	Canton, US	86	1526
# of filed Patents : 86 Total Citations : 1526
Rozak, Gary	Akron, US	16	231
# of filed Patents : 16 Total Citations : 231

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Patent Citation Ranking

• 29 Citation Count
• C23C Class

• 74.62 % this patent is cited more than
• 14 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2011/0303,535

SPUTTERING TARGETS AND METHODS OF FORMING THE SAME

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Abstract

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In various embodiments, sputtering targets incorporate an intermediate plate having a coefficient of thermal expansion (CTE) between a CTE of the backing plate and a CTE of the target material.

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Description

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Claims

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