Wear-Resistant Conformal Coating for Micro-Channel Structure

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United States of America Patent

APP PUB NO 20110303404A1
SERIAL NO

13155986

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Abstract

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A conformal, multilayer micro-channel structure having a wear-resistant interior micro-channel surface coating of an ALD deposited conformal alumina (Al2O3) ceramic of about 1000 Å in thickness and a titanium nitride (TiN) of about 300 Å to about 1000 Å in thickness. The Al2O3/TiN multilayer structure is resistant to erosion and to electro-chemical corrosion as is found in prior art micro-channel coolers and structures.

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Patent OwnerAddress
PFG IP LLC150 PACIFIC AVENUE SAN FRANCISCO CA 94111

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tea, Nim Cupertino, US 15 125

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