MEMS THREE-AXIS ACCELEROMETER
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United States of America Patent
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Issued Date -
Dec 15, 2011
app pub date -
Jan 28, 2011
filing date -
Jun 11, 2010
priority date (Note) -
Abandoned
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Abstract
A MEMS three-axis accelerometer includes a silicon substrate, a first electrode and a second electrode etched in the same silicon substrate. The first electrode is constituted by a mobile mass fitted with a plurality of mobile fingers extending laterally. The second electrode is composed of two conductive parts located on two opposite sides of the mobile mass. Each conductive part comprises a plurality of fixed fingers formed parallel to the mobile fingers. Each mobile finger is positioned between two contiguous fixed fingers to cooperatively form a microstructure with interdigital combs. The mobile mass is connected to the substrate by a spring.
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