TRI-AXIS ACCELEROMETER
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United States of America Patent
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Issued Date -
Dec 15, 2011
app pub date -
Jan 28, 2011
filing date -
Jun 11, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An tri-axis accelerometer is disclosed. The tri-axis accelerometer includes a mass, a first group of capacitance, a third group of capacitance being neighbor to the first group of capacitance. The mass defines an upper surface, a lower surface parallel to the upper surface and a side wall connecting the upper surface and the lower surface. The first group of capacitance includes a first movable electrode and the third group of capacitance includes a third movable electrode. The first movable electrode is perpendicular to the third movable electrode.
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