Method and Device for Examining a Sample with a Probe Microscope
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United States of America Patent
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Issued Date -
Dec 8, 2011
app pub date -
May 30, 2008
filing date -
May 31, 2007
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Abandoned
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Abstract
The invention relates to a method for examining a sample by using probe microscopy, in particular scanning probe microscopy in which a sample is examined by way of a probe microscope with a multi-part measuring probe comprising a probe element and a guide clement guiding the probe element during the probe microscopy examination with the method furthermore comprising the following steps: capturing of noise measuring signals for the measuring probe in a non measuring configuration in which the probe clement is arranged separately from the guide element, capturing of measuring signals for the measuring probe in a measuring configuration in which the probe element is guided by the guide element, and analysing the measuring signals by at least partially assigning the measuring signals to the noise measuring signals. Further, the invention relates to a device for examining a sample with a probe microscope.
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