Importance

Loading Importance Indicators...

Abstract

The invention relates to an apparatus and a method for depositing one or more thin layers of polymeric para-xylylene. Said apparatus comprises a heated evaporator (1) used for evaporating a solid or liquid starting material. A supply pipe (11) for a carrier gas extends into said evaporator (1). The carrier gas conducts the evaporated starting material, in particular the evaporated polymer, into a pyrolysis chamber (2) which is located downstream of the evaporator (1) and in which the starting material is decomposed. The apparatus further comprises a deposition chamber (8) which is located downstream of the decomposition chamber (2) and encompasses a gas inlet (3) through which the decomposed product conducted by the carrier gas is admitted, a susceptor (4) which has a supporting surface (4') opposite the gas inlet (3) in order to support a substrate (7) that is to be coated with the polymerized decomposed product, and a gas outlet (5). In order to be able to deposit a thin polymer layer that especially has a homogeneous layer thickness and covers a large area, the gas inlet (2) forms a planar gas distributor which has a gas discharge surface (3') that extends parallel to the supporting surface (4') and is fitted with a plurality of gas discharge ports (6) distributed across the entire gas discharge surface (3').

Loading the Abstract Image...

First Claim