METHOD FOR FORMING A BORON-CONTAINING THIN FILM AND MULTILAYER STRUCTURE

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United States of America Patent

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13125767

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I'MSEP CO LTD134 CHUDOJI MINAMI-MACHI SHIMOGYO-KU KYOTO-SHI KYOTO 6008813

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Yasuhiko Kyoto, JP 23 167
Nishikiori, Tokujiro Kyoto, JP 8 32
Satomi, Tsuyoshi Kyoto, JP 6 99
Tokushige, Manabu Kyoto, JP 3 13
Tsujimura, Hiroyuki Kyoto, JP 3 13
Tsurumi, Naoaki Kyoto, JP 8 31

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