IMPEDANCE-MATCHING TRANSFORMERS FOR RF DRIVEN CO2 GAS DISCHARGE LASERS
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United States of America Patent
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Issued Date -
Nov 24, 2011
app pub date -
May 24, 2010
filing date -
May 24, 2010
priority date (Note) -
Abandoned
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Abstract
gas discharge laser energized by a radio frequency (RF) power source a transformer having selectively variable output impedance is used to match output impedance of the power source to the impedance of discharge electrodes of the laser. A similar transformer can be used to impose a selective variable phase-shift on the RF power from the source. The variable impedance transformer can also be used for impedance matching between amplifier stages in the power source.
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