MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
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United States of America Patent
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Issued Date -
Nov 24, 2011
app pub date -
May 20, 2011
filing date -
May 21, 2010
priority date (Note) -
Abandoned
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Abstract
Micromechanical membranes suitable for formation of mechanical resonating structures are described, as well as methods for making such membranes. The membranes may be formed by forming cavities in a substrate, and in some instances may be oxidized to provide desired mechanical properties. Mechanical resonating structures may be formed from the membrane and oxide structures.
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