Sample Holder, Inspection Apparatus, and Inspection Method
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United States of America Patent
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Issued Date -
Nov 24, 2011
app pub date -
May 3, 2011
filing date -
May 20, 2010
priority date (Note) -
Abandoned
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Abstract
A sample holder, inspection apparatus, and an inspection method using the sample holder having a film including a first surface and a second surface. A liquid sample may be held on the first surface. The film is made of two or more layers. A primary beam irradiation device is installed in a reduced-pressure space. Consequently, the sample can be observed or inspected while maintaining the sample at the atmospheric pressure.
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