Aluminum Doped Zinc Oxide Sputtering Targets
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United States of America Patent
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Issued Date -
Nov 24, 2011
app pub date -
May 16, 2011
filing date -
May 21, 2010
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Abandoned
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Abstract
phase in a hexagonal ZnO phase, said ZnO phase further comprises less than 1 wt % of elemental Al in solid solution, expressed versus the total weight of said target material.
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