APPARATUS FOR WET PROCESSING SUBSTRATE
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United States of America Patent
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Issued Date -
Nov 24, 2011
app pub date -
Oct 28, 2010
filing date -
May 20, 2010
priority date (Note) -
Abandoned
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Abstract
An exemplary apparatus for wet processing a substrate includes a conveyor configured for conveying the substrate along a conveying direction and parallel spray pipes. The spray pipes are substantially parallel with the conveyor and substantially perpendicular to the conveying direction. Each spray pipe consisting of at least one spray nozzle faces the conveyor, and the number of the at least one nozzle of each spray pipe increases along the conveying direction.
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