METAL-INSULATOR-METAL CAPACITOR AND METHOD FOR FABRICATING METAL-INSULATOR-METAL CAPACITOR STRUCTURES
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United States of America Patent
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Issued Date -
Nov 17, 2011
app pub date -
May 17, 2010
filing date -
May 17, 2010
priority date (Note) -
Abandoned
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Abstract
A Metal-Insulator-Metal Capacitor and Method for Fabricating Metal-Insulator-Metal Capacitor Structures. The MIM (Metal insulator Metal) capacitor structure comprising a Capacitor Top Metal (CTM); a dielectric; and a Capacitor Bottom Metal (CBM); said CTM comprising an etch stop portion; a conductivity portion having a lower resistivity compared to the etch stop portion; and an interface portion of a different material from the conductivity portion; wherein the conductivity portion is sandwiched between the etch stop portion and the interface portion; and the interface portion interfaces the CTM with the dielectric.
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