METHOD AND IMPLANTER FOR IMPLANTING A WORKPIECE
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United States of America Patent
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Issued Date -
Nov 17, 2011
app pub date -
May 17, 2010
filing date -
May 17, 2010
priority date (Note) -
Abandoned
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Abstract
To form one or more dose region(s) on a workpiece, a projected area of an ion beam on the workpiece is initially moved parallel to a long axis of the projected area from an edge of the workpiece to an opposite edge of the workpiece, and then is moved parallel to a short axis of the projected area a shifted distance shorter than the short axis of the projected area. Thereafter, repeat the moving step and the shifting step in sequence until all dose region(s) is completely formed. Accordingly, the cross-sectional size of the projected area is only proportional to the short axis when it is moved along its long axis. Hence, it is similar to use a narrow pen to paint a wall, and then it is suitable for forming different dose regions with different doses on a workpiece, such as the dose split.
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