MEMS MICROPHONE
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United States of America Patent
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Issued Date -
Nov 10, 2011
app pub date -
Dec 26, 2010
filing date -
May 4, 2010
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A MEMS microphone includes a silicon substrate defining an opening, a diaphragm being supported above the substrate and a backplate opposite from the diaphragm for forming a capacitor together with the diaphragm. The diaphragm includes a central vibrating portion and a plurality of serpentine segments extending from an edge of the vibrating portion. Each of the serpentine segments includes a first spring and a second spring symmetric to the first spring about an axis extending from a center of the vibrating portion. Each spring includes a first end connecting to the edge of the vibrating portion, a bending portion and a second end extending from the bending portion for anchoring the diaphragm to the substrate. The bending portion extends along a path having the same outline as that of the vibrating portion.
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