Method for interferometric detection of surfaces
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 27, 2011
app pub date -
Dec 9, 2009
filing date -
Dec 9, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The invention relates to a method for imaging a microfabricated device comprising at least one oscillating component. The method comprises stroboscopically illuminating in an interferometric setup said component in synchronized relationship with the excitation of the device, and detecting interference light in synchronized relationship with the illumination and excitation. According to the invention the component is illuminated at a wavelength band which is at least partly transmissible by the component, and the positions of at least two separate surfaces of the component of interest are determined based on the interference light detected at least at two temporal phases of excitation of the device. The invention provides an efficient method for in-depth characterization of micromechanical structures that provide only one-sided access during operation.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully