MICRO-MACHINED TEMPERATURE DEPENDENT ONE-SHOT VALVE AND PROCESS FOR PRODUCTION THEREOF

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United States of America Patent

SERIAL NO

13154551

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Abstract

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deposited on one face of the silicon substrate to obstruct the channel.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHAJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Debray, Alexis Tokyo, JP 12 39

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