SOFT LITHOGRAPHY DEVICE AND PROCESS
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United States of America Patent
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Issued Date -
Oct 27, 2011
app pub date -
Mar 8, 2011
filing date -
Apr 26, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present technology relates to a device and process for soft lithography by micro-contact printing using a flexible stamp to make a structured deposit of molecules on a substrate such as a glass plate intended for microscopic observation. It enables a simple and effective control of the application pressure of a stamp or a macro-stamp for soft lithography on the surface of a substrate and makes the automation of the soft lithography process easier by integrating the automatic stamp change into it. Micro-contact printing stamps of the invention preferably comprise a flexible stamp including a layer containing soft ferromagnetic particles. Micro-contact printing apparatuses of the invention preferably comprise a magnetic field generator capable of applying uniform pressure to contact a stamp against a substrate, and further are preferably capable of holding the stamp, contacting the stamp with an inking tank, and changing the stamp.
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