BELL JAR FOR SIEMENS REACTOR INCLUDING THERMAL RADIATION SHIELD
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United States of America Patent
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Issued Date -
Oct 13, 2011
app pub date -
Apr 11, 2011
filing date -
Apr 12, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A bell jar for a Siemens reactor of the type used to deposit polycrystalline silicon on a plurality of heated silicon rods via chemical vapor deposition process. The bell jar includes a thermally conductive inner wall having an interior surface at least partially defining an interior space adapted to receive the plurality of heated silicon rods therein. A thermal radiation shield is in the interior space generally adjacent to and in opposing relationship with the interior surface of the inner wall. The thermal radiation shield is substantially opaque to thermal radiation emitted from the plurality of heated silicon rods in the interior space of the bell jar.
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