OPTICAL INSTRUMENT FOR TESTING OPTICAL SYSTEMS AND SAMPLES

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United States of America Patent

SERIAL NO

13140022

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention is related with the optical instrument such as interferometer for testing the optical systems and samples whereas the optical instrument comprises the laser (1) for generating the laser beam which passes the beam expander (2), beam-splitter (23) dividing the laser beam to a working light beam and reference light beam, focusing objectives (3, 7), flat glass plate (4) with one side coated by thin metal highly reflecting coating with the pattern including a pinhole, computer (12), CCD camera (13), tested part or optical system (6). In addition the optical instrument comprises at least two flat mirrors (24, 25), observation objective and at least one stop (20) placed between the beam-splitter (23), flat mirrors (24, 25) and/or focusing objective (7).

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Patent Owner(s)

Patent OwnerAddress
VTT-NTM OURIIA 185A TARTU 51014

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuznetsov, Aleksei Narva, EE 5 1
Suk, Jung Mee Gyeonggi-Do, KR 1 1
Tsikhanchuk, Heorhi Minsk, BY 1 1
Voznesenskaya, Maria Tartu, EE 1 1

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