Clamping device and coating apparatus having same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Feb 12, 2013
Grant Date -
Oct 13, 2011
app pub date -
Aug 19, 2010
filing date -
Apr 8, 2010
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A clamping device for clamping a substrate with a first surface and a second surface includes a supporting plate and a number of clamping units. The supporting plate includes a base portion and an engaging portion. The base portion includes a base surface. The engaging portion protrudes from the base surface of the base portion and includes an engaging surface facing away from the base surface. The supporting plate defines a through hole in the engaging surface. The supporting plate is configured for supporting the substrate on the engaging surface of the engaging portion. The clamping units are configured for clamping the substrate on the supporting plate such that the engaging surface of the engaging portion engaging surface is substantially coplanar with the first surface of the substrate.
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