NON-SINTERED METAL-INSULATOR-METAL CAPACITOR AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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Issued Date -
Oct 6, 2011
app pub date -
May 10, 2010
filing date -
Apr 6, 2010
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Abandoned
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Abstract
The present disclosure relates to a non-sintering metal-insulator-metal (MIM) capacitor and a method of manufacturing the same. The method of manufacturing a non-sintered MIM capacitor includes manufacturing a lower metal-insulator-upper metal structure, wherein the insulator is formed by a non-sintering process comprising: preparing a ceramic-polymer composition comprising a highly dielectric ceramic powder, a polymer resin, and a solvent, the highly dielectric ceramic powder comprising small powder and large powder having a larger average particle size than the small powder; forming a ceramic-polymer film by depositing the ceramic-polymer composition on the lower metal; and curing the polymer resin in the ceramic-polymer film.
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