METHOD FOR CLEANING A VACUUM PUMP
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United States of America Patent
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Issued Date -
Sep 29, 2011
app pub date -
Oct 27, 2009
filing date -
Oct 28, 2008
priority date (Note) -
Abandoned
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Abstract
A method for cleaning a vacuum pump (10) having a pump chamber (12) with at least one pump rotor (14) includes performing the steps of: a) filling a cleaning liquid (28) into the pump chamber (12), b) distributing the cleaning liquid (28) in the pump chamber (12), c) dissolving impurities with the cleaning liquid (28), d) draining the cleaning liquid (28) from the pump chamber (12).
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