METHOD TO DECREASE WARPAGE OF A MULTI-LAYER SUBSTRATE AND STRUCTURE THEREOF
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United States of America Patent
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app pub date -
May 10, 2011
filing date -
Feb 18, 2008
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Abandoned
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Abstract
Disclosed is a method to decrease warpage of a multi-layer substrate, comprises a plurality of metal layers and a plurality of dielectric layers, which are alternately formed. A plane parallel with a first metal layer and a second metal layer of the plurality of metal layers substantially has the same distance between the first metal layer and the second metal layer respectively. The plane is defined as a central plane between the first metal layer and the second metal layer. A first total area covered by metal in the first metal layer is larger than a second area covered by metal in the second metal layer. At least one redundant metal is further set in same layer of the second metal layer. A second total area comprising a redundant metal area covered by the redundant metal and the second area is considerably equivalent to the first total area.
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