Apparatus for transmission of energy and/or for transportation of an ion as well as a particle beam device having an apparatus such as this
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United States of America Patent
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Issued Date -
Aug 11, 2011
app pub date -
Jan 27, 2011
filing date -
Jan 28, 2010
priority date (Note) -
Abandoned
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Abstract
An apparatus for transmission of energy of an ion to at least one gas particle and/or for transportation of an ion and a particle beam device having an apparatus such as this are disclosed. In particular, a container is provided, in which a gas is arranged which has gas particles, wherein the container has a transport axis. Furthermore, at least one first multipole unit and at least one second multipole unit are provided, which are arranged along the transport axis. The first multipole unit and the second multipole unit are formed by printed circuit boards. Furthermore, an electronic circuit is provided, which provides each multipole unit with a potential, such that a potential gradient is generated, in particular along the transport axis.
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