MICROMACHINED PIEZOELECTRIC ULTRASOUND TRANSDUCER ARRAYS
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United States of America Patent
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app pub date -
Apr 8, 2011
filing date -
Oct 26, 2007
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Abandoned
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Abstract
A piezoelectric composite micromachined ultrasound transducer including single and multilayer 1-D and 2-D arrays having through-wafer-vias (TWVs) that significantly decreased electrical impedance per element, and hence the improved electrical impedance matching to T/R electronics and improved signal to noise ratio is disclosed. The TWVs facilitate integrated interconnection in single element transducers (positive and negative contact on the same side) and array transducers (contact pads array for integration with T/R switches and/or pre-amplifier circuits).
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