MASS FLOW CONTROLLER WITH IMPROVED DYNAMIC RESPONSE
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United States of America Patent
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app pub date -
Feb 24, 2011
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Aug 25, 2008
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Abstract
A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.
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