Mix head assembly for forming chemical mechanical polishing pads

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United States of America Patent

PATENT NO 8118897
SERIAL NO

13084159

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Abstract

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A mix head assembly for use in the manufacture of chemical mechanical polishing pad polishing layers is provided, wherein inclusions of entrained gas inclusion defects are minimized.

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS HOLDING INC451 BELLEVUE ROAD NEWARK DE 19713

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Esbenshade, John Clayton, US 2 4
Geiger, Andrew M Newark, US 3 6
Libbers, Paul Claymont, US 2 4
November, Samuel J Newtown, US 5 38
Sacchetti, Paul J Warrington, US 4 8
Tracy, Jonathan Kennett Square, US 13 20
Verbaro, David Cinnaminson, US 3 4
Watkins, Michael E Bear, US 2 4

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