ALIGNING CHARGED PARTICLE BEAMS
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Jul 28, 2011
app pub date -
Aug 12, 2009
filing date -
Sep 30, 2008
priority date (Note) -
Abandoned
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Abstract
Disclosed are systems (2000) and a method for aligning a charged particle beam (2100) in charged particle optics that include a charged particle source (2010) and a charged particle optical column (2040), where at least one electrode (2050, 2060) of the column includes a plurality of segments, and where different electrical potentials are applied to at least some of the segments to correct for source (2010) till and/or displacement errors and to align particle beam (2100) a long axis (2045) of the column (2040). Alternatively, magnetic field-generating elements can be used for aligning.
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